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X-선 반사율법 입문
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X-선 반사율법 입문
발행일 : 2010년 11월 30일
인쇄일 : 2010년 12월 10일
저 자 : Sakurai KENJI
역 자 : 김양수, 김희진, 박성균, 이상걸, 이종식
인쇄처 : 한림원출판사TEL. 02.2273.4201 / FAX. 02.2273.4240 http://www.hanrimwon.co.kr
*ISBN978-89-93512-20-5 93430
*잘못된 책을 바꾸어 드립니다.
*저자의 허락 없이 내용의 일부를 인용하거나 발췌하는 것을 법으로 금합니다.
목 차
CONTENTS
INTRODUCTION TO X-RAY REFLECTIVITY
1.1. X-선 반사율측정법의 특징 ·············································· 1
1.2. 박막의 밀도결정 ························································· 3
1.2.1. 단일 전자에 의한 산란 ················································ 5
1.2.2. 단일 원자에 의한 산란 ················································ 7
1.2.3. 물질에 의한 산란 ······················································ 8
1.2.4. 공명산란 ····························································· 10
1.3. 박막의두께결정························································· 15
1.3.1. Parratt에 의한 근사 ·················································· 18
1.3.2. 매트릭스법 ··························································· 21
1.3.3. 단층박막의 두께 ····················································· 22
1.3.4. 다층박막의 두께 ····················································· 23
1.3.5. 전산모사에의한박막두께············································· 23
1.3.6. 평가할 수 있는 최소박막두께와 측정각도범위 ························· 23
1.4. 박막의 표면 및 계면거칠기의 결정 ··································· 24
1.4.1. 계면의 밀도가 연속적으로 변화하는 경우 ··························· 24
1.4.2. 계면 요철이 있는 경우 ··············································· 27
1.4.3. 동력학적근사 ························································ 30
1.4.4. 유효밀도모델과 밀도슬라이스법····································· 30
1.5. 결정으로부터 반사율··················································· 33
1.6. 공명자기반사율························································· 33
1.7. 결맞음(Coherence) ····················································· 40
1.8. 실제 측정과 데이터 해석의 기초······································ 42
1.8.1. 보정과 반사 세기의 규격화 ········································· 42
1.8.2. 실제의 시료구조 ····················································· 43
1.8.3. 질량밀도의 상관 ····················································· 44
1.8.4. 데이터 핏팅과 위상 문제 ············································ 45
참고문헌······································································ 47
2.1. X-선 반사율 측정 장치에 필요한 조건································ 49
2.2. X-선 반사율 측정 장치의 실제 ········································ 52
2.2.1. X-선원································································ 53
2.2.2. 모노크로미터·콜리메이터 ·········································· 54
2.2.3. 고니오미터와시료스테이지 ·········································· 56
2.2.4. X-선수광부··························································· 56
2.2.5. X-선검출기··························································· 57
2.3. 반사율의측정방법 ······················································ 60
2.3.1. 광학계의선택 ························································ 60
2.3.2. 시료위치조정 ························································ 61
2.3.3. 시료위치조정오차의 영향············································ 64
2.3.4. 높은 정밀도의 시료위치조정법 ······································ 66
2.3.5. 시료표면의 오염에 의한 영향 ········································ 68
2.3.6. 시료가 작은 경우····················································· 69
2.4. 산만산란측정 ··························································· 70
참고문헌······································································ 72
한림원출판사 홈페이지에 오신것을 환영합니다.
